Denoising and Filtering Aberration-Corrected STEM Images of III-V Semiconductor Heterostructures

Pena R.D.; Liang S.; Manfra M.J.; Diaz R.E. · IEEE Andescon, ANDESCON 2024 - Proceedings (2024) · DOI: 10.1109/andescon61840.2024.10755936

Resumen

High-angle annular dark field (HAADF) imaging is a technique in scanning transmission electron microscopy (STEM) used to build images of micro- and nanostructures with an atomic resolution. In this work, 111- V semiconductor heterostructures (in this case GaAslAIAs superlattice) have been analyzed using this method and here, we showed a technique to reduce noise and scattering present in the image. As the roughness and segregation of 111- V semiconductor interfaces affect their performance, we used composition maps and profiles using Atomap and Hyperspy Python libraries to visualize the chemical variation along the heterostructure. Additionally, the filtered and denoised image with its respective intensity maps and profiles are compared with the original image and its intensity maps and profiles to show the improvement of the analysis.